Plasma Electronics : Applications in Microelectronic Device Fabrication ＜Series in Plasma Physics 20＞

書籍データ

Applications in Microelectronic Device Fabrication

著者名：By (author) Makabe, Toshiaki; By (author) Petrovic, Zoran Lj.他の作品を見る

出版社：Taylor & Francis Inc

発売日：2006.03.27

360p

ISBN：9781420012279